Micromachined two dimensional resistor arrays for determination of gas parameters

Author

van Baar, J.J. ; Verweij WA ; Dijkstra, M. ; Wiegerink, R.J. ; Lammerink, T.S.J. ; Krijnen, G.J.M. ; Elwenspoek, M.

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

Volume

2

fYear

2003

Firstpage

1606

Abstract

A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance.

Keywords

diffusion; electric sensing devices; flow measurement; heat losses; microsensors; silicon compounds; temperature measurement; thermal conductivity; thin film resistors; viscosity; wide band gap semiconductors; SiC; diffusion coefficient; flow velocity; fluid parameter; gas parameter; heat losses; micromachined flow channel; temperature coefficient of resistance; thermal conductivity; two dimensional resistive sensor array; viscosity; Conductivity measurement; Electrical resistance measurement; Fluid flow measurement; Resistors; Sensor arrays; Temperature distribution; Temperature measurement; Temperature sensors; Thermal conductivity; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1217088

Filename

1217088