Micromachined two dimensional lens scanner with large aperture beam

Author

Park, Hyeon-Cheol ; Song, Cheol ; Jeong, Ki-Hun

Author_Institution

Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea

fYear

2010

Firstpage

91

Lastpage

92

Abstract

This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and y-scanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.

Keywords

aspherical optics; electrostatic actuators; lenses; micro-optomechanical devices; microlenses; micromachining; optical scanners; aperture beam; electrostatic MEMS actuators; frequency 276.5 Hz; frequency 294.4 Hz; micromachining; millimeter aspheric glass lenses; optical path folding; two dimensional lens scanner; Glass; Lenses; Micromechanical devices; Optical fibers; Optical imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672168

Filename

5672168