DocumentCode
1729852
Title
Large-size infrared reflow microlens based on stacked layers
Author
Aonuma, Takuro ; Kumagai, Shinya ; Sasaki, Minoru
Author_Institution
Dept. of Adv. Sci. & Technol., Toyota Technol. Inst., Nagoya, Japan
fYear
2010
Firstpage
93
Lastpage
94
Abstract
Large-size (~mm) reflow microlens is fabricated combining with UV curing process. Underlying stacked resist layers can assist the material movement of the photoresist in the reflow process generating the convex parabola shape. Stacking thickness shows the clear linearity. Infrared imaging performance is confirmed using 1.5 mm-diameter microlens.
Keywords
curing; infrared imaging; microlenses; photoresists; UV curing; convex parabola shape; infrared imaging; large-size infrared reflow microlens; photoresist; size 1.5 mm; stacked layers; stacked resist layers; stacking thickness; Curing; Films; Lenses; Microoptics; Resists; Shape; Infrared microlens; Large-size; Stacked layer; UV-curing;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location
Sapporo
Print_ISBN
978-1-4244-8926-8
Electronic_ISBN
978-1-4244-8925-1
Type
conf
DOI
10.1109/OMEMS.2010.5672169
Filename
5672169
Link To Document