DocumentCode
1729925
Title
A CMOS-MEMS filter using a V-coupler and electrical phase inversion
Author
Giner, J. ; Uranga, A. ; Torres, F. ; Marigo, E. ; Gamarra, J. L Munoz ; Barniol, N.
Author_Institution
Electron. Eng. Dept., Univ. Autonoma de Barcelona, Barcelona, Spain
fYear
2010
Firstpage
344
Lastpage
348
Abstract
In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85 MHz for a 29 MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 μm.
Keywords
CMOS integrated circuits; electric connectors; micromechanical devices; radiofrequency filters; radiofrequency integrated circuits; Austria Micro-systems; V-shaped coupler; bandwidth 1.85 MHz; capacitance module; center frequency; electrical phase inversion mechanism; filter response; frequency 29 MHz; full integrated CMOS-MEMS filter; in-plane vibrations; size 0.35 mum; Band pass filters; Bandwidth; Couplers; Couplings; Electrodes; Micromechanical devices; Resonator filters;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium (FCS), 2010 IEEE International
Conference_Location
Newport Beach, CA
ISSN
1075-6787
Print_ISBN
978-1-4244-6399-2
Type
conf
DOI
10.1109/FREQ.2010.5556313
Filename
5556313
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