Title :
A CMOS-MEMS filter using a V-coupler and electrical phase inversion
Author :
Giner, J. ; Uranga, A. ; Torres, F. ; Marigo, E. ; Gamarra, J. L Munoz ; Barniol, N.
Author_Institution :
Electron. Eng. Dept., Univ. Autonoma de Barcelona, Barcelona, Spain
Abstract :
In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85 MHz for a 29 MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 μm.
Keywords :
CMOS integrated circuits; electric connectors; micromechanical devices; radiofrequency filters; radiofrequency integrated circuits; Austria Micro-systems; V-shaped coupler; bandwidth 1.85 MHz; capacitance module; center frequency; electrical phase inversion mechanism; filter response; frequency 29 MHz; full integrated CMOS-MEMS filter; in-plane vibrations; size 0.35 mum; Band pass filters; Bandwidth; Couplers; Couplings; Electrodes; Micromechanical devices; Resonator filters;
Conference_Titel :
Frequency Control Symposium (FCS), 2010 IEEE International
Conference_Location :
Newport Beach, CA
Print_ISBN :
978-1-4244-6399-2
DOI :
10.1109/FREQ.2010.5556313
