Title :
Mechanically tunable coupled photonic crystal nanocavities
Author :
Chew, Xiongyeu ; Zhou, Guangya ; Chau, Fook Siong ; Deng, Jie ; Tang, Xiaosong ; Loke, Yee Chong
Author_Institution :
Micro/Nano Syst. Initiatives, Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
We report a MEMS-integrated on-chip tunable resonator consisting of two coupled one-dimensional (1D) Photonic Crystal nanocavities capable of achieving a relatively large tuning range with no significant deterioration of quality factor and sufficiently large transmissions.
Keywords :
integrated optoelectronics; light transmission; micro-optomechanical devices; micromechanical resonators; nanophotonics; optical resonators; optical tuning; photonic crystals; MEMS-integrated onchip tunable resonator; mechanically tunable coupled photonic crystal nanocavity; optical transmission; quality factor; Micromechanical devices; Optical device fabrication; Optical resonators; Optical waveguides; Photonics; Tuning;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672181
