Negative ion densities in Cl/sub 2/ and BCl/sub 3/ inductively-coupled plasmas

Author

Fleddermann, C.B. ; Hebner, G.A.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

fYear

1997

Firstpage

140

Lastpage

141

Abstract

Summary form only given, as follows. The chlorine negative ion density and the electron density in Cl/sub 2/ and BCl/sub 3/ inductively-coupled plasmas have been measured in a GEC reference cell operated in the inductively-coupled mode. The chlorine negative ion density was measured as an excess electron density produced by photo-dissociation of the negative ions by 266 nm radiation from a frequency-quadrupled Nd:YAG laser. Both the excess electron density and the steady-state electron density were measured using a microwave interferometer. Various gas mixtures were investigated including pure Cl/sub 2/ pure BCl/sub 3/, and combinations of these gases with each other and N/sub 2/ and Ar.Cl/sup -/ densities up to 4/spl times/10/sup 11/cm/sup -3/ were measured depending on the gas mixture.

Keywords

chlorine; chlorine compounds; electromagnetic wave interferometry; electron density; ion density; plasma density; plasma diagnostics; 266 nm; BCl/sub 3/; Cl/sub 2/; GEC reference cell; electron density; frequency-quadrupled Nd:YAG laser; gas mixtures; inductively-coupled plasmas; megative ion density; microwave interferometer; photodissociation; Density measurement; Electrons; Frequency measurement; Gas lasers; Laser modes; Masers; Microwave measurements; Plasma density; Plasma measurements; Steady-state;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on

Conference_Location

San Diego, CA, USA

ISSN

0730-9244

Print_ISBN

0-7803-3990-8

Type

conf

DOI

10.1109/PLASMA.1997.604420

Filename

604420