Title :
Negative ion densities in Cl/sub 2/ and BCl/sub 3/ inductively-coupled plasmas
Author :
Fleddermann, C.B. ; Hebner, G.A.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
Summary form only given, as follows. The chlorine negative ion density and the electron density in Cl/sub 2/ and BCl/sub 3/ inductively-coupled plasmas have been measured in a GEC reference cell operated in the inductively-coupled mode. The chlorine negative ion density was measured as an excess electron density produced by photo-dissociation of the negative ions by 266 nm radiation from a frequency-quadrupled Nd:YAG laser. Both the excess electron density and the steady-state electron density were measured using a microwave interferometer. Various gas mixtures were investigated including pure Cl/sub 2/ pure BCl/sub 3/, and combinations of these gases with each other and N/sub 2/ and Ar.Cl/sup -/ densities up to 4/spl times/10/sup 11/cm/sup -3/ were measured depending on the gas mixture.
Keywords :
chlorine; chlorine compounds; electromagnetic wave interferometry; electron density; ion density; plasma density; plasma diagnostics; 266 nm; BCl/sub 3/; Cl/sub 2/; GEC reference cell; electron density; frequency-quadrupled Nd:YAG laser; gas mixtures; inductively-coupled plasmas; megative ion density; microwave interferometer; photodissociation; Density measurement; Electrons; Frequency measurement; Gas lasers; Laser modes; Masers; Microwave measurements; Plasma density; Plasma measurements; Steady-state;
Conference_Titel :
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-3990-8
DOI :
10.1109/PLASMA.1997.604420
