Title :
Tunable optical diffusers for high-power laser applications based on magnetically actuated membranes
Author :
Masson, Jonathan ; Bich, Andreas ; Noell, Wilfried ; Voelkel, Reinhard ; Weible, Kenneth J. ; De Rooij, Nico F.
Author_Institution :
Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland
Abstract :
A dynamic laser beam shaper based on MEMS technology is presented. A magnetically actuated deformable single crystal silicon micromembrane is deformed in resonance to diffuse and homogenize laser beams. The large aperture mirror shows line generation with angles up to 1° and line smoothing capabilities. High power density handling is demonstrated up to 140 W/cm2.
Keywords :
magneto-optical devices; membranes; micro-optomechanical devices; micromirrors; optical films; optical resonators; optical tuning; silicon; MEMS; Si; dynamic laser beam shaper; high power density handling; large aperture mirror; laser beams; magnetically actuated deformable single crystal silicon micromembrane; tunable optical diffusers; Biomembranes; Laser applications; Laser beams; Magnetic resonance; Mirrors; Optical reflection; Silicon;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672185
