Title :
Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control
Author :
Kaneko, Yuka ; Nakamura, Yukinori ; Wakui, Shinji ; Kim, Byung Sub ; Song, Chang Kyu
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
Abstract :
This paper presents the simulator for air-spring type anti-vibration apparatuses, which are utilized for semiconductor exposure equipment. Rotational and translational motions of the apparatuses are simulated based on the dynamical model and the geometric alignment of sensors and actuators. The performance of the mode control implemented in the simulator is evaluated. Simulation results show advantages of this control method.
Keywords :
geometry; motion control; pneumatic actuators; pneumatic control equipment; sensors; springs (mechanical); actuators; air-spring-type pneumatic antivibration apparatus simulator; dynamical model; geometric alignment; mode control; rotational motion simulation; semiconductor exposure equipment; sensors; six-degree-of-freedom; translational motion simulation; Actuators; Atmospheric modeling; Mathematical model; Sensitivity; Sensors; Simulation; Springs;
Conference_Titel :
Advanced Mechatronic Systems (ICAMechS), 2012 International Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4673-1962-1
