Title :
Control of a pneumatic isolation table by flow meter: Improvement of repeatability in various switching points of the feedforward compensator
Author :
Shirani, Habiburahman ; Nakamura, Yukinori ; Wakui, Shinji
Author_Institution :
Dept. of Electron. & Inf. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
Abstract :
In this paper, we consider the compensation of the pneumatic isolation table´s fluctuation caused by switching of the feedforward compensator. The feedforward and table´s acceleration paths are combined and the combined signal is sent through a pseudo integrator and a damping gain to the voice coil motor. Retuning of the feedforward compensator´s gains are investigated for the suppression of flow disturbance. The effectiveness of this control scheme for the compensation of switching is demonstrated by experimental results.
Keywords :
compensation; damping; electric motors; feedforward; flowmeters; integrating circuits; pneumatic systems; vibration isolation; damping gain; feedforward compensator; feedforward compensator gains; flow disturbance suppression; flow meter; pneumatic isolation table control; pneumatic isolation table fluctuation compensation; pseudointegrator; repeatability; switching points; table acceleration paths; voice coil motor; Damping; Feedforward neural networks; Fluctuations; Springs; Switches; Valves; Damping loop; Feedforward compensator; Pneumatic isolation table; Supplied air; Switching; Voice coil motor;
Conference_Titel :
Advanced Mechatronic Systems (ICAMechS), 2012 International Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4673-1962-1
