Title :
A new fabrication technique for integrating silica optical devices and MEMS
Author :
Grutter, Karen E. ; Yeh, Anthony M. ; Patra, Susant K. ; Wu, Ming C.
Author_Institution :
Berkeley Sensor & Actuator Center (BSAC), Univ. of California, Berkeley, CA, USA
Abstract :
We have developed a novel fabrication process which integrates silicon MEMS actuators with silica optical components. Suspended silica optical waveguides are actuated by a silicon electrostatic comb drive actuator, with a maximum displacement of 8 μm at 35 V bias.
Keywords :
electrostatic devices; micro-optomechanical devices; microactuators; optical fabrication; silicon compounds; SiO2; electrostatic comb drive actuator; fabrication technique; silicon MEMS actuators; Actuators; Micromechanical devices; Optical filters; Optical waveguides; Silicon; Silicon compounds;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672199
