• DocumentCode
    1730654
  • Title

    A new fabrication technique for integrating silica optical devices and MEMS

  • Author

    Grutter, Karen E. ; Yeh, Anthony M. ; Patra, Susant K. ; Wu, Ming C.

  • Author_Institution
    Berkeley Sensor & Actuator Center (BSAC), Univ. of California, Berkeley, CA, USA
  • fYear
    2010
  • Firstpage
    33
  • Lastpage
    34
  • Abstract
    We have developed a novel fabrication process which integrates silicon MEMS actuators with silica optical components. Suspended silica optical waveguides are actuated by a silicon electrostatic comb drive actuator, with a maximum displacement of 8 μm at 35 V bias.
  • Keywords
    electrostatic devices; micro-optomechanical devices; microactuators; optical fabrication; silicon compounds; SiO2; electrostatic comb drive actuator; fabrication technique; silicon MEMS actuators; Actuators; Micromechanical devices; Optical filters; Optical waveguides; Silicon; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
  • Conference_Location
    Sapporo
  • Print_ISBN
    978-1-4244-8926-8
  • Electronic_ISBN
    978-1-4244-8925-1
  • Type

    conf

  • DOI
    10.1109/OMEMS.2010.5672199
  • Filename
    5672199
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1730654