Polymer-MEMS torsion mirror with large rotation angle and low driving voltage

This paper presents a novel fabrication of a monolithic PMMA torsional mirror utilizing hot embossing, surface-activated direct bonding, and the elliptical vibration cutting. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding micro structures. An efficient technique using reinforcement material to protect the PMMA microstructures during release process was proposed. Monolithic PMMA torsional mirror actuated by vertical comb actuator has been fabricated and tested successfully. Since the Young´s modulus is 50 times lower than that of Si, the driving voltage of the PMMA actuator should be 7 times lower than that of silicon counterpart.