Translatory MEMS actuator with extraordinary large stroke for optical path length modulation

Author

Sandner, Thilo ; Grasshoff, Thomas ; Schenk, Harald

Author_Institution

Fraunhofer Inst. for Photonic Microsyst. (IPMS), Dresden, Germany

fYear

2010

Firstpage

25

Lastpage

26

Abstract

A translatory MOEMS actuator with extraordinary large stroke-especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers-is presented for the first time. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm² aperture using four pantographs. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 500 Hz amplitude has been measured in vacuum of 50 Pa and 90 V driving voltage.

Keywords

Fourier transform spectrometers; electrostatic actuators; infrared spectrometers; micro-optomechanical devices; microactuators; optical modulation; electrostatic resonance; frequency 500 Hz; large mirror plate; miniaturized FTIR-spectrometers; optical path length modulation; pantographs; suspension design; translational out-of-plane oscillation; translatory MOEMS actuator; Actuators; Micromechanical devices; Mirrors; Optical modulation; Optical sensors; Suspensions; Voltage measurement; Fourier-transform infrared spectrometers; Optical SOI-MEMS; infrared spectrometry; optical path length modulation; translatory micro mirrors;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672203

Filename

5672203