Title : 
Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN/sup 2/ switches
         
        
            Author : 
Jui-Che Tsai ; Huang, Shanjin ; Hah, D. ; Wu, M.C.
         
        
            Author_Institution : 
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
         
        
        
        
        
            Abstract : 
A new high-port-count wavelength selective switch has been realized using two cross-scanning 1-axis analog micromirror arrays in a 4-f optical system. The number of output ports is increased from N to N/sup 2/, where N is the maximum linear port count limited by optical diffraction. Using surface-micromachined micromirrors with hidden vertical combdrives, large scan angles (>/spl plusmn/5/spl deg/ mechanical), low drive voltages (7 V), and high fill factors (>96.25%) are achieved for both scanning mirrors. Experimental results of our 1/spl times/8 (3/spl times/3 collimator array) wavelength-selective switch are also reported. A fiber-to-fiber insertion loss of 6 dB and a switching time of < 700 /spl mu/sec have been achieved.
         
        
            Keywords : 
micromirrors; optical arrays; optical fibre losses; optical switches; wavelength division multiplexing; 6 dB; 7 V; analog micromirror arrays; fibre-fiber insertion loss; optical diffraction; optical system; orthogonal scanning mirrors; surface-micromachined micromirrors; wavelength-selective 1XN/sup 2/ switches; Insertion loss; Low voltage; Micromirrors; Mirrors; Optical arrays; Optical collimators; Optical diffraction; Optical fiber losses; Optical surface waves; Optical switches;
         
        
        
        
            Conference_Titel : 
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
         
        
            Conference_Location : 
Boston, MA, USA
         
        
            Print_ISBN : 
0-7803-7731-1
         
        
        
            DOI : 
10.1109/SENSOR.2003.1217130