100 MHz oscillator based on a low polarization voltage capacitive Lamé-mode MEMS resonator

This paper describes the implementation of a 100 MHz oscillator based on a Lame-mode MEMS resonator polarized with a low dc bias voltage (<; 5 V). Under low vacuum, the MEMS resonator exhibits high quality factors up to 60000 ensuring reasonable performance in terms of measured phase noise: -100 dBc/Hz @ 1 kHz from carrier. A specific capacitive actuation/detection scheme ensures an active cancellation of the feedthrough capacitances and facilitates the balance by the rack level sustaining electronics of the equivalent 50 kΩ motional impedance (on resonance) of the 100 MHz resonator.