Title :
MEMS filters based on traveling flexural waves
Author :
Houri, Samer ; Raskin, Jean-Pierre ; Francis, Laurent A.
Author_Institution :
ICTEAM, Univ. catholique de Louvain, Louvain-la-Neuve, Belgium
Abstract :
This paper introduces MEMS filters based on the use of traveling flexural waves. The underlying concept of these devices draws on an analogy with SAW devices, while replacing the surface elastic wave with a flexural wave on a suspended beam. This is in contrast with traditional flexural MEMS devices whereby all signal processing is done via a resonating element corresponding to a standing flexural wave. As far as the authors are aware this is the first study regarding traveling flexural wave devices and their frequency domain behavior.
Keywords :
elastic waves; filters; frequency-domain analysis; micromechanical devices; surface acoustic wave devices; MEMS filters; SAW devices; flexural MEMS devices; frequency domain behavior; resonating element; signal processing; traveling flexural waves; Acoustic beams; Conductors; Couplings; Fingers; Frequency response; Integrated circuit modeling; Micromechanical devices;
Conference_Titel :
Frequency Control Symposium (FCS), 2010 IEEE International
Conference_Location :
Newport Beach, CA
Print_ISBN :
978-1-4244-6399-2
DOI :
10.1109/FREQ.2010.5556353
