• DocumentCode
    1731072
  • Title

    Accounting for incomplete ionization in modeling silicon based semiconductor devices

  • Author

    Cole, Daniel C. ; Johnson, Jeffrey B.

  • Author_Institution
    IBM Gen. Technol. Div., Essex Junction, VT, USA
  • fYear
    1989
  • Firstpage
    73
  • Lastpage
    77
  • Abstract
    The authors review the approaches used to describe incomplete ionization quantitatively. They describe a simple approach that can easily be incorporated into device modeling programs and that appears to yield good results. At low doping concentrations, the model is equivalent to the incomplete ionization formulae presented in device engineering textbooks. At high doping concentrations, the model predicts that all impurities are ionized, as is observed experimentally. The model is a phenomenological one, with two parameters that make connections with physical parameters at low and high doping concentrations. A least-squares method that yields these parameters is discussed. Finally, the authors give some device simulation results and describe how incomplete ionization must enter into the current continuity equations for electrons and holes
  • Keywords
    doping profiles; impurity electron states; least squares approximations; semiconductor device models; Si; current continuity equations; device simulation; high doping concentrations; incomplete ionization; least-squares method; low doping concentrations; modeling; phenomenological model; semiconductor devices; Doping; Gaussian processes; Impurities; Ionization; Semiconductor devices; Semiconductor process modeling; Silicon; Solid state circuits; Tail; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Low Temperature Semiconductor Electronics, 1989., Proceedings of the Workshop on
  • Conference_Location
    Burlington, VT
  • Type

    conf

  • DOI
    10.1109/LTSE.1989.50185
  • Filename
    50185