Vertical comb-drive MEMS mirror with sensing function for phase-shift device

Author

Oda, Kentaro ; Terao, Kyohei ; Suzuki, Takaaki ; Takao, Hidekuni ; Ishimaru, Ichiro ; Oohira, Fumikazu

Author_Institution

Dept. of Intell. Mech. Syst. Eng., Kagawa Univ., Kagawa, Japan

fYear

2010

Firstpage

5

Lastpage

6

Abstract

We aim to achieve the phase-shift device which is a key component of two-dimensional Fourier spectrometer using the MEMS mirror fabricated by the micro fabrication technology. This mirror maintains parallel movement to the reference plane toward the vertical direction with a high precision. Therefore, in this study, the vertical electrostatic comb-drive actuator and displacement capacitive sensors were fabricated monolithically on one chip, and they were arrayed in 4 directions of the movable mirror. We fabricated the MEMS mirror that can move toward the vertical direction with sensing the tilting angle. As the result, we confirmed that the vertical comb-drive MEMS mirror with the sensing function for the phase-shift device could be realized.

Keywords

Fourier transform spectrometers; capacitive sensors; micro-optomechanical devices; microfabrication; micromirrors; optical fabrication; MEMS mirror; displacement capacitive sensors; microfabrication; phase-shift device; two-dimensional Fourier spectrometer; vertical electrostatic comb-drive actuator; Actuators; Capacitance; Micromechanical devices; Mirrors; Sensors; Teeth; Voltage measurement; Deep-RIE; MEMS mirror; SOI; capacitive sensor; phase-shift; vertical comb-drive actuator;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672213

Filename

5672213