Title :
Extraction of heat transfer macromodels for MEMS devices
Author :
Che-Chia Yu ; Yao-Joe Yang
Author_Institution :
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
A model order reduction (MOR) technique for heat-transfer system-level modeling is presented. A heat transfer solver using the finite difference method (FDM), which is appropriate for MEMS thermal analysis, is implemented. The numerical models generated by the FDM solver then were successfully reduced into low-order compact models by an Arnoldi-based model-order-reduction technique. The compact macromodels can be easily inserted into system-level or circuit simulators. We also demonstrated that the macromodel results for a thermal actuator are in good agreement with the experimental results.
Keywords :
circuit simulation; finite difference methods; finite element analysis; heat transfer; microactuators; Arnoldi-based model-order-reduction technique; MEMS devices; circuit simulators; finite difference method; heat transfer macromodels; heat-transfer system-level modeling; model order reduction; numerical models; thermal actuator; thermal analysis; Boundary conditions; Equations; Finite difference methods; Geometry; Heat transfer; Microelectromechanical devices; Micromechanical devices; Numerical models; Solid modeling; Thermal conductivity;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217149
