Title :
Interferometric methods of 3D surface structure analysis
Author_Institution :
Zygo Corp., Middlefield, CT, USA
Abstract :
This brief review of modern interferometric methods of surface measurements describes basic techniques, typical applications and common performance specifications. Recent developments include model based methods, analysis of surface structures that include transparent films and optically unresolved features, and systems designed specifically to be compatible with industrial environments and international standards.
Keywords :
light interferometry; surface topography measurement; 3D surface structure analysis; industrial environments; interferometric method; international standards; optically unresolved features; surface measurement; transparent film; 3D; Interferometer; metrology; microscope;
Conference_Titel :
Information Optics (WIO), 2012 11th Euro-American Workshop on
Conference_Location :
Quebec City, QC
Print_ISBN :
978-1-4673-2000-9
Electronic_ISBN :
978-1-4673-1998-0
DOI :
10.1109/WIO.2012.6488917
