Title :
Monolithic fabrication of wireless miniaturized quartz crystal microbalance (QCM-R) array for biochemical sensing
Author :
Rabe, J. ; Seidemann, V. ; Buettgenbach, S.
Author_Institution :
Inst. for Microtechnol., Tech. Univ. Braunschweig, Germany
Abstract :
We report on a novel wireless quartz crystal microbalance sensor array with integrated micro coils for remote readout (QCM-R). It consists of miniaturized quartz crystal microbalances solely fabricated by microfabrication batch processes including wet chemical thinning of quartz membranes, electroplating of micro coils through lithographic masks and via interconnections through the quartz substrate. Measurements with varying distance between QCM-R and readout coil showed the resonant frequency independence of the coupling. Recent experiments with immobilized Protein A and the adsorption of its antibody proved the excellent performance of the system.
Keywords :
adsorption; biosensors; chemical sensors; electroplating; integrated circuit interconnections; lithography; masks; microbalances; microsensors; molecular biophysics; monolithic integrated circuits; proteins; quartz; QCM; SiO/sub 2/; adsorption; biochemical sensing; electroplating; immobilized protein A; interconnections; lithographic masks; microcoils; microfabrication batch processes; monolithic fabrication; quartz membranes; remote readout coil; resonant frequency; wet chemical thinning; wireless miniaturized quartz crystal microbalance sensor array; Biomembranes; Biosensors; Chemical and biological sensors; Chemical processes; Coils; Fabrication; Frequency measurement; Resonant frequency; Sensor arrays; Wireless sensor networks;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217155
