A micromachined knife gate valve for high-flow pressure regulation applications

Author

van der Wijngaart, W. ; Ridgeway, A.S. ; Stemme, G.

Author_Institution

Dept. of Signals, Sensors, & Syst., R. Inst. of Technol., Stockholm, Sweden

Volume

2

fYear

2003

Firstpage

1931

Abstract

Cross-flow pressure regulating valve structures are attractive for high-flow pressure control applications due to the decreased actuation force required and the reduced device footprint area. A knife gate valve was fabricated, controlling a flow of 1.3 Nl/min at a supply pressure of 1.5 bar. The valve was microfabricated using deep reactive ion etching (DRIE) and silicon fusion bonding. The use of micromachined knife gate valves in pressure control systems enhances performance and cost savings can be realized.

Keywords

elemental semiconductors; flow measurement; microsensors; pressure control; pressure measurement; pressure sensors; silicon; sputter etching; 1.5 bar; Si; actuation force; deep reactive ion etching; device footprint area; flow pressure regulation application; microfabrication; micromachined knife gate valve; silicon fusion bonding; Actuators; Dynamic range; Electrical equipment industry; Force sensors; Microvalves; Pneumatic systems; Pressure control; Valves; Vents; Weight control;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1217170

Filename

1217170