• DocumentCode
    1731977
  • Title

    Encapsulated MEMS resonators — A technology path for MEMS into Frequency Control applications

  • Author

    Kim, B. ; Melamud, R. ; Candler, R.A. ; Hopcroft, M.A. ; Jha, C.M. ; Chandorkar, S. ; Kenny, T.W.

  • Author_Institution
    Departments of Mechanical and Electrical Engineering, Stanford University, CA 94305, USA
  • fYear
    2010
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    MEMS resonators have been discussed as replacements for quartz crystals in electronics timing applications for more than 40 years. The emergence of high-quality, low-cost packaging for MEMS resonators has enabled the first demonstrations of long-term stability and opened the door for commercial applications.
  • Keywords
    Bonding; Coatings; Encapsulation; Glass; Micromechanical devices; Sealing materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium (FCS), 2010 IEEE International
  • Conference_Location
    Newport Beach, CA, USA
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4244-6399-2
  • Type

    conf

  • DOI
    10.1109/FREQ.2010.5556386
  • Filename
    5556386
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1731977