DocumentCode

1732162

Title

Circuit Simulation Model Of Gas Damping In Microstructures With Nontrivial Geometries

Author

Veijola, Timo ; Ryhinen, T. ; Kuisma, Heikki ; Lahdenpera, Juha

Author_Institution

Helsinki University Of Technology, Circuit Theory Laboratory

Volume

2

fYear

1995

Firstpage

36

Lastpage

39

Keywords

Accelerometers; Circuit simulation; Damping; Equations; Finite difference methods; Fluid flow; Geometry; Microstructure; Silicon; Solid modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721738

Filename

721738