Title :
In Situ Tensile Strength Measurement Of Thick-film And Thin Film Micromacrined Structures
Author :
Greek, Staffan ; Ericson, Fredric ; Johausson, S. ; Schweitz, Jan-Åke
Author_Institution :
Uppsala University
Keywords :
Actuators; Dry etching; Force sensors; Micromanipulators; Performance evaluation; Probes; Tensile stress; Testing; Thickness measurement; Transistors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721743
