Title :
Fracture Strength Of Doped And Undoped Polysilicon
Author :
Biebl, M. ; von Philipsborn, H.
Author_Institution :
Universitat Regensburg
Keywords :
Etching; Geometry; Grain boundaries; Hafnium; Residual stresses; Silicon; Stress measurement; Surface cracks; Tensile stress; Testing;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721747
