• DocumentCode
    1732414
  • Title

    Electrical And Piezoresistive Characterization Of Boron Doped Lpcvd Polycrystalline Silicon Under Rapid Thermal Annealing

  • Author

    Le Berre, M. ; Kleimann, P. ; Scirmiache, B. ; Barbier, D. ; Pinard, P.

  • Author_Institution
    LPM-INSA
  • Volume
    2
  • fYear
    1995
  • Firstpage
    76
  • Lastpage
    79
  • Keywords
    Boron; Charge carrier density; Conductivity; Density measurement; Electric variables measurement; Piezoresistance; Rapid thermal annealing; Silicon on insulator technology; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721748
  • Filename
    721748
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1732414