Title :
Electrical And Piezoresistive Characterization Of Boron Doped Lpcvd Polycrystalline Silicon Under Rapid Thermal Annealing
Author :
Le Berre, M. ; Kleimann, P. ; Scirmiache, B. ; Barbier, D. ; Pinard, P.
Author_Institution :
LPM-INSA
Keywords :
Boron; Charge carrier density; Conductivity; Density measurement; Electric variables measurement; Piezoresistance; Rapid thermal annealing; Silicon on insulator technology; Temperature measurement; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721748
