Position control of a vacuum gate valve and its evaluation

Author

Imai, Yusuke ; Nakamura, Yukinori ; Wakui, Shinji

Author_Institution

Dept. of Electron. & Inf. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan

fYear

2012

Firstpage

229

Lastpage

234

Abstract

This paper considers the positioning of a motor in a vacuum gate valve which is used in a vacuum chamber. First, by using reinforcement of bearings´ stiffness with permanent magnets, the fluctuation of the valve is suppressed. Next, by adjusting command signals and MR sensor´s outputs, the repeatability of the positioning is improved. Moreover, three-dimensional dynamic analysis of the motor is performed by using magnetic analysis software “MagNet7.” Simulation results agree with experimental results. Finally, sequential operation of the valve is performed without mechanical contact in atmosphere and vacuum.

Keywords

control engineering computing; elastic constants; electronic engineering computing; flow control; magnetorheology; manufacturing processes; permanent magnets; position control; semiconductor device manufacture; valves; 3D dynamic analysis; MR sensor output adjustment; MagNet7; bearing stiffness reinforcement; command signal adjustment; magnetic analysis software; manufacture process; motor positioning; permanent magnets; position control; semiconductor chips; vacuum chamber; vacuum gate valve; valve fluctuation suppression; Coils; Electromagnets; Force; Magnetic levitation; Magnetic noise; Rotors; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Mechatronic Systems (ICAMechS), 2012 International Conference on

Conference_Location

Tokyo

ISSN

1756-8412

Print_ISBN

978-1-4673-1962-1

Type

conf

Filename

6329715