• DocumentCode
    1732437
  • Title

    High Sensitive Internal Film Stress Measurement By An Improved Micromachined Indicator Structure

  • Author

    Ericson, Fredric ; Greek, Staffan ; Söderkvist, Jan ; Schweitz, Jan-Åke

  • Author_Institution
    Uppsala University
  • Volume
    2
  • fYear
    1995
  • Firstpage
    84
  • Lastpage
    87
  • Keywords
    Accelerometers; Actuators; Arm; Compressive stress; Etching; Internal stresses; Mechanical factors; Production; Stress measurement; Tensile stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721750
  • Filename
    721750
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1732437