Title :
Determination Of The Elastic Temperature Coefficients Of Monocrystalline Silicon
Author :
Bourgeois, C. ; Hermann, J. ; Blanc, N. ; de Rooij, N.F. ; Rudolf, F.
Author_Institution :
CSEM Centre Suisse d´´Electronique et de Microtechnique SA
Keywords :
Availability; Frequency; Mechanical factors; Mechanical sensors; Micromachining; Microstructure; Silicon; Springs; Temperature measurement; Vibrations;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721752
