Title :
Tensile Testing Of Epitaxial Silicon Films
Author :
Cunningham, Shawn J. ; Suwito, Wan ; Read, David T.
Author_Institution :
Ford Microelectronics Inc.
Keywords :
Force measurement; Poisson equations; Semiconductor films; Semiconductor process modeling; Silicon; Strain measurement; Structural beams; Tensile stress; Testing; Thermal stresses;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721753
