Title :
Determination Of The Mechanical Properties Of Microstructures
Author :
Ye, X.Y. ; Zhou, Z.Y. ; Yang, Y. ; Zhang, J.H. ; Yao, J.
Author_Institution :
Tsinghua University
Keywords :
Equations; Fatigue; Frequency measurement; Mechanical factors; Microstructure; Residual stresses; Resonance; Resonant frequency; Stress measurement; Structural beams;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721754
