Title :
Surface Micromachined Metallic Microactuator Wit14 Buckling Characteristics
Author :
Quenzer, H.J. ; Maciossek, A. ; Wagner, B. ; Pott, H.
Author_Institution :
Fraunhofer-Institut fur Siliziumtechnologie
Keywords :
Actuators; Bridges; Capacitive sensors; Electrostatics; Etching; Heating; Microactuators; Silicon; Thermal conductivity; Thermal expansion;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721761
