Title : 
A Multi-layer Eddy Current Micro Sensor For Non-destructive Inspection Of Small Diameter Pipes
         
        
            Author : 
Hamasaki, Yukio ; Ide, Takahiro
         
        
            Author_Institution : 
Tokyo Gas Co.,Ltd. Frontier Technology Research Institute
         
        
        
        
        
        
            Keywords : 
Coils; Copper; Current measurement; Eddy currents; Fabrication; Inductance; Inspection; Magnetic sensors; Sensor systems; Spirals;
         
        
        
        
            Conference_Titel : 
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
         
        
            Conference_Location : 
Stockholm, Sweden
         
        
            Print_ISBN : 
91-630-3473-5
         
        
        
            DOI : 
10.1109/SENSOR.1995.721763