DocumentCode
1732880
Title
Miniaturised Polarisation Sensor As A Concept For New Optical Microsystems
Author
Stenkamp, B. ; Abraham, M. ; Amato, J.P. ; Zetterer, Th ; Pokrowsky, P.
Author_Institution
IMM Institut fur Mikrotechnik GmbH
Volume
2
fYear
1995
Firstpage
160
Lastpage
162
Keywords
Microelectronics; Optical films; Optical polarization; Optical refraction; Optical sensors; Optical variables control; Process control; Refractive index; Thin film sensors; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721769
Filename
721769
Link To Document