Title :
A Highly Sensitive Pirani Vacuum Gauge
Author :
Chou, Bruce C S ; Shic, J.-S. ; Chen, Yeong-Maw
Author_Institution :
Institute of Electro-Optical Engineering, National Chiao Tung University
Keywords :
Biomembranes; Circuits; Electrooptic devices; Equations; Pressure measurement; Resistors; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721771
