DocumentCode
1732919
Title
A Highly Sensitive Pirani Vacuum Gauge
Author
Chou, Bruce C S ; Shic, J.-S. ; Chen, Yeong-Maw
Author_Institution
Institute of Electro-Optical Engineering, National Chiao Tung University
Volume
2
fYear
1995
Firstpage
167
Lastpage
170
Keywords
Biomembranes; Circuits; Electrooptic devices; Equations; Pressure measurement; Resistors; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721771
Filename
721771
Link To Document