Title :
High Temperature Microsensors Based On Polycrystalline Diamond Thin Films
Author :
Obermeier, Ernst
Author_Institution :
Technical University of Berlin, Microsensor and Microactuator Technology
Keywords :
Boron; Conductivity; Doping; Etching; Fabrication; Microsensors; Plasma applications; Plasma temperature; Silicon; Transistors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721774
