DocumentCode
1733070
Title
Applications Of Crystalline-amorphous Phase Transitions In Silicon Carbide
Author
Wagner, Ch ; Krötz, G. ; Sonntag, H. ; Muller, G. ; Midler, G. ; Kalbitzer, S.
Author_Institution
Daimler-Benz AG
Volume
2
fYear
1995
Firstpage
194
Lastpage
197
Keywords
Amorphous materials; Biomembranes; Crystallization; Etching; Optical films; Optical sensors; Plasma applications; Semiconductor films; Silicon carbide; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721778
Filename
721778
Link To Document