Title :
Sputter Deposition Of TiNi And TiNiPd Films Displaying The Two Way Shape Memory Effect
Author :
Quandt, E. ; Halene, C. ; Holleck, H. ; Feit, K. ; Kohl, M. ; Macher, P. Schlo
Author_Institution :
Forschungszentrum Karlsruhe GmbH
Keywords :
Actuators; Annealing; Hysteresis; Magnetic materials; Magnetostriction; Microactuators; Shape; Sputtering; Substrates; Temperature;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721780
