• DocumentCode
    1733167
  • Title

    Thin Film Boron Doped Polycrystalline Silicon/sub70%/-germanium/sub30%/ For Thermopiles

  • Author

    Van Gerwen, P. ; Slater, T. ; Chévrier, J.B. ; Baert, K. ; Mertens, R.

  • Author_Institution
    IMEC, MAP MS-division
  • Volume
    2
  • fYear
    1995
  • Firstpage
    210
  • Lastpage
    213
  • Keywords
    Biomembranes; Boron; Conducting materials; Resistance heating; Semiconductor thin films; Silicon; Temperature; Thermal conductivity; Thermal resistance; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Conference_Location
    Stockholm, Sweden
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721782
  • Filename
    721782
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1733167