DocumentCode
1733231
Title
Technology Of Diamond Microelctromechanical Systems
Author
Aslam, M. ; Schulz, D.
Author_Institution
Department of Electrical Engineering, Michigan State University
Volume
2
fYear
1995
Firstpage
222
Lastpage
224
Keywords
Atomic force microscopy; Atomic layer deposition; Chromium; Gears; Hydrogen; Inductors; Scanning electron microscopy; Semiconductor films; Temperature distribution; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721785
Filename
721785
Link To Document