Title :
Electron behavior in inhomogeneous DC discharges
Author :
Kimura, T. ; Ohe, K.
Author_Institution :
Dept. of Syst. Eng., Nagoya Inst. of Technol., Japan
Abstract :
Summary form only given. The radial dependence of the electron energy distribution function in N/sub 2/ and He positive columns is measured by a Langmuir probe. The discharge is produced in a 1.8 cm-/spl phi/ glass chamber, in which the gas pressure is from 0.32 Torr to 1.0 Torr and the discharge current range from 20 mA to 100 mA.
Keywords :
Langmuir probes; discharges (electric); helium; nitrogen; plasma temperature; positive column; 0.32 to 1 torr; 1.8 cm; 20 to 100 mA; He; Langmuir probe; N/sub 2/; electron behavior; electron energy distribution function; inhomogeneous DC discharges; positive columns; radial dependence; Chaos; Electron tubes; Energy measurement; Helium; Kinetic theory; Length measurement; Plasma simulation; Plasma temperature; Position measurement; Tail;
Conference_Titel :
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-3990-8
DOI :
10.1109/PLASMA.1997.604432
