Title :
A 2-D Vertical Hall Magnetic Field Sensor Using Active Carrier Confinement And Micromachining Techniques
Author :
Paranjape, M. ; Landsberger, L. ; Kahrizi, Mojtaba
Author_Institution :
School of Engineering Science, Simon Fraser University
Keywords :
CMOS integrated circuits; CMOS process; Carrier confinement; Design engineering; Design optimization; Etching; Implants; Magnetic sensors; Micromachining; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721793
