• DocumentCode
    1733773
  • Title

    A 2-D Vertical Hall Magnetic Field Sensor Using Active Carrier Confinement And Micromachining Techniques

  • Author

    Paranjape, M. ; Landsberger, L. ; Kahrizi, Mojtaba

  • Author_Institution
    School of Engineering Science, Simon Fraser University
  • Volume
    2
  • fYear
    1995
  • Firstpage
    253
  • Lastpage
    256
  • Keywords
    CMOS integrated circuits; CMOS process; Carrier confinement; Design engineering; Design optimization; Etching; Implants; Magnetic sensors; Micromachining; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Conference_Location
    Stockholm, Sweden
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721793
  • Filename
    721793
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1733773