Title :
Micro Coils Fabricated By UV Depth Lithography And Galvanoplating
Author :
Löchel, B. ; Maciossek, A. ; Rothe, M. ; Windbracke, W.
Author_Institution :
Fraunhofer-Institut fur Siliziumtechnologie
Keywords :
Coatings; Coils; Fabrication; Galvanizing; Lithography; Magnetic heads; Micromachining; Printing; Resists; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721796
