Title :
A New Fabrication Process Of A Planar Coil Using Photosensitive Polyimide And Electroplating
Author :
Watanabe, Y. ; Edo, M. ; Nakazawa, H. ; Yonezawa, E.
Author_Institution :
Fuji Electric Corporate Research and Development, Ltd.
Keywords :
Actuators; Coils; Copper; Electromagnetic forces; Fabrication; Lithography; Platinum; Polyimides; Sputtering; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721797
