DocumentCode :
1734473
Title :
Fabrication of 2D pH CMOS image sensors and real time imaging of chemical reaction
Author :
Hizawa, Takeshi ; Sawada, Kazuaki ; Takao, Hidekuni ; lshida, M.
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
Volume :
2
fYear :
2005
Firstpage :
1138
Abstract :
We present about pH image sensors, which are capable of measuring 2D distribution of various chemical reaction in real time. The pH CMOS image sensor using charge transfer technique is a novel pH sensor and imaging sensor that is capable of measuring variations on the chemical reaction as an image, and it was fabricated by CMOS (complimentary metal-oxide semiconductor) circuit process technology. Prototype pH CMOS image sensors are successfully fabricated and measured 2D distribution of various chemical reactions in moving image at 1/30 sec per 1 frame. It is expected that the pH CMOS image sensor is able to use for novel applications such as medical and biochemistry field.
Keywords :
CMOS image sensors; chemical sensors; pH measurement; 2D pH CMOS image sensors; CMOS circuit process technology; charge transfer technique; complimentary metal-oxide semiconductor; pH measurement; real time chemical reaction imaging; CMOS image sensors; Charge measurement; Charge transfer; Charge-coupled image sensors; Chemical processes; Chemical sensors; Chemical technology; Current measurement; Fabrication; Image sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
Type :
conf
DOI :
10.1109/SENSOR.2005.1497277
Filename :
1497277
Link To Document :
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