DocumentCode

1734540

Title

Bakable Silicon Pneumatic Microvalve

Author

Sim, D.Y. ; Kurabayashi, T. ; Esashi, M.

Author_Institution

Faculty of Engineering, Tohoku University Sendai

Volume

2

fYear

1995

Firstpage

280

Lastpage

283

Keywords

Bonding; Control systems; Fabrication; Fluid flow; Force control; Glass; Microvalves; Pneumatic actuators; Silicon; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721800

Filename

721800