A light-in light-out micro mirror device

Author

Yamauchi, Yuko ; Higo, Akio ; Kakushima, Kuniyuki ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

Volume

2

fYear

2005

Firstpage

1175

Abstract

In this paper, we report a new concept of optical MEMS (Micro Electro Mechanical System) devices that could be operated by the incident light and to operate yet another light beam; in other words, a light beam is controlled by another light beam through an optical MEMS mirror. A photodiode and an electrostatic micro mirror are integrated into an SOI (silicon-on-insulator) wafer, whose circuit diagram is equivalent to that of a photocoupler. The mechanism can be used for free-space optical computing and optically-addressed fiber optic crossconnect.

Keywords

integrated optics; micromechanical devices; micromirrors; optical computing; optical control; optical fibres; photodiodes; silicon; silicon-on-insulator; circuit diagram; electrostatic actuator; fiber optic crossconnect; free space optical computing; integrated optics; light beam control; micromirror device; optical MEMS; photocoupler; photodiode; silicon-on-insulator wafer; Control systems; Lighting control; Mechanical systems; Micromechanical devices; Mirrors; Optical beams; Optical computing; Optical control; Optical devices; Photodiodes;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497287

Filename

1497287