DocumentCode

1734995

Title

A Valve-less Planar Pump In Silicon

Author

Olsson, Anders ; Eftoksson, P. ; Sternme, G. ; Stemme, Göran

Volume

2

fYear

1995

Firstpage

291

Lastpage

294

Keywords

Etching; Glass; Micropumps; Neck; Pumps; Sensor systems; Silicon; Valves; Virtual manufacturing; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721803

Filename

721803