Title :
Optical beam steering using 2-D surface acoustic wave actuator
Author :
Shigematsu, Takashi ; Tseki, T. ; Okumura, Mikio ; Sugawara, Takashi ; Kurosawa, Minoru K.
Author_Institution :
Dept. of Adv. Appl. Electron., Tokyo Inst. of Technol., Japan
Abstract :
Steering angle over 20 degrees two-axis optical beam steering prototype that employs a mirror on a two-axis gimbal is developed, which takes advantage of two-dimensional planner surface acoustic wave actuator. For the actuation of 20 degrees of tilt angle, 10 ms duration of driving power input is required for actuation, then additional 10 ms for mirror structure´s damping produced complete angle holding. Note that any power supply is unnecessary to hold the angle. The resolution of the angle was 0.003 degree because of high-resolution ability of the actuator. The beam steering prototype showed 104 dynamic range of angle positioning ability.
Keywords :
beam steering; microactuators; micromirrors; surface acoustic wave devices; ultrasonic cleaning; ultrasonic motors; 2D surface acoustic wave actuator; MEMS; angle holding; angle positioning; damping; mirror; optical beam steering; planner motor; two-axis gimbal; ultrasonic motor; Acoustic waves; Actuators; Beam steering; Damping; Mirrors; Optical beams; Optical surface waves; Power supplies; Prototypes; Surface acoustic waves;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497307