DocumentCode :
1735270
Title :
Experiments on semi-closed loop oscillatory control for cantilevered electromagnetic actuators using gradient force model
Author :
Suzuki, Tatsuya ; Nonaka, Kenichiro
Author_Institution :
Dept. of Mech. Syst. Eng., Tokyo City Univ., Tokyo, Japan
fYear :
2011
Firstpage :
1088
Lastpage :
1093
Abstract :
Micro electro-mechanical systems (MEMS) are fabricated by applying semiconductor manufacturing technology. MEMS which integrate sensors and actuators are prospective in a wide field like automotives and medicines. The actuator integrated in MEMS often employs nonlinear forces like electromagnetic force and electrostatic force. For the gap closing actuators, it is known that pull-in instability due to nonlinear forces strictly limits mobility range. We have proposed the open loop oscillatory stabilization control as a solution for this problem, however, model error on nonlinear electromagnetic force causes steady state deviation. To resolve this problem, in this paper, we propose a closed loop feedback oscillatory control of the position of the cantilevered electromagnetic actuators. The actuator is oscillatory controlled but the amplitude and the bias current are adaptively tuned using the gradient of the electromagnetic force model. Thus we reduce the steady state deviation due to identification error of electromagnetic force. The advantage of the proposed method is shown through the experiments where inevitable modeling error exists.
Keywords :
closed loop systems; electromagnetic actuators; electromagnetic forces; gradient methods; micromechanical devices; stability; automotives; cantilevered electromagnetic actuators; closed loop feedback oscillatory control; electrostatic force; gap closing actuators; gradient force model; medicines; micro electromechanical systems; nonlinear electromagnetic force; nonlinear forces; open loop oscillatory stabilization control; pull-in instability; semi closed loop oscillatory control; semiconductor manufacturing technology; sensors; Actuators; Adaptation models; Computational modeling; Electromagnetic forces; Force; Micromechanical devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Control Applications (CCA), 2011 IEEE International Conference on
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4577-1062-9
Electronic_ISBN :
978-1-4577-1061-2
Type :
conf
DOI :
10.1109/CCA.2011.6044385
Filename :
6044385
Link To Document :
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